Tailoring of surface plasmon resonances in TiN/(Al0.72Sc0.28)N multilayers by dielectric layer thickness variation

Thin Film Physics Division, Department of Physics, Chemistry and Biology, Linköping University, 581 83 Linköping, Sweden Karlsruhe Institute of Technology (KIT), Institute of Nanotechnology (INT), Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany Joint Research Laboratory Nanomaterials (KIT and TUD) at Technische Universität Darmstadt (TUD), Jovanka-Bontschits-Str. 2, 64287 Darmstadt, Germany Bradley Department of Electrical and Computer Engineering, Virginia Tech, Blacksburg, VA 24061, USA Department of Materials Science and Engineering, Virginia Tech, Blacksburg, VA 24061, USA Department of Materials Science and Engineering, University of California, Berkeley, CA 94720, USA